INTEGRATION SCHEME FOR ADVANCED BEOL METALLIZATION INCLUDING LOW-K CAPPING LAYER AND METHOD THEREOF

Details for Australian Patent Application No. 2002360420 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors WANG, Yun, Yu; GATES, Stephen; AGARWALA, Birendra, N.; FITZSIMMONS, John, A.; LEE, Jia; LUSTIG, Naftali, E.

Pub. Number AU-A-2002360420

PCT Number PCT/US02/37756

PCT Pub. Number WO2003/061002

Priority 10/047,968 15.01.02 US

Filing date 22 November 2002

Wipo publication date 30 July 2003

International Classifications

H01L 023/48 Details of semiconductor or other solid state devices - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads or terminal arrangements

H01L 021/469 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/4763 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/047,968 15.01.02 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002360420

30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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