Owner The Board of Trustees of the University of Illinois

Inventors Bullen, David Andrew; Liu, Chang; Zhang, Ming

Agent Davies Collison Cave

Pub. Number AU-B-2002360242

PCT Number PCT/US02/23626

PCT Pub. Number WO2003/036767

Priority 10/008,719 07.12.01 US; 60/307,976 26.07.01 US

Filing date 26 July 2002

Wipo publication date 6 May 2003

Acceptance publication date 1 November 2007

H01L 21/027 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B81B 3/00 (2006.01) Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81B 7/04 (2006.01) Micro-structural systems

G01N 13/16 (2006.01) Investigating surface or boundary effects, e.g. wetting power

G03F 7/00 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

G03F 7/20 (2006.01) Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G12B 21/02 (2006.01)

G01N 35/10 (2006.01) Automatic analysis not limited to methods or materials provided for in any single one of groups - Devices for transferring samples to, in, or from, the analysis apparatus, e.g. suction devices, injection devices