PLASMA TREATMENT METHOD

Details for Australian Patent Application No. 2002359950 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors FUJIMOTO, Kiwamu; JY, Jeong; FUSE, Takashi

Pub. Number AU-A-2002359950

PCT Number PCT/JP02/13861

PCT Pub. Number WO2003/058700

Priority 2002-104160 05.04.02 JP; 2002-933 07.01.02 JP

Filing date 27 December 2002

Wipo publication date 24 July 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 2002-104160 05.04.02 JP; 2002-933 07.01.02 JP

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002359950

23 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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