METHOD OF ENHANCING CLEAR FIELD PHASE SHIFT MASKS WITH BORDER REGIONS AROUND PHASE 0 AND PHASE 180 REGIONS

Details for Australian Patent Application No. 2002359860 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LUKANC, Todd, P.; SPENCE, Christopher, A.

Pub. Number AU-A-2002359860

PCT Number PCT/US02/41466

PCT Pub. Number WO2003/054626

Priority 10/016,273 11.12.01 US

Filing date 9 December 2002

Wipo publication date 9 July 2003

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/016,273 11.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002359860

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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