APPARATUS AND METHOD FOR TREATING A WORKPIECE USING PLASMA GENERATED FROM MICROWAVE RADIATION

Details for Australian Patent Application No. 2002359718 (hide)

Owner THE PROCTER AND GAMBLE COMPANY

Inventors MCDANIEL, John, Andrew; MIRALAI, Seyed, Farhad; DATTA, Saswatti; SHANOV, Vesselin, Nikolov

Pub. Number AU-A-2002359718

PCT Number PCT/US02/40231

PCT Pub. Number WO2003/056601

Priority 10/027,616 21.12.01 US

Filing date 17 December 2002

Wipo publication date 15 July 2003

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/027,616 21.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002359718

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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