OPTICAL PROFILOMETRY OF ADDITIONAL-MATERIAL DEVIATIONS IN A PERIODIC GRATING

Details for Australian Patent Application No. 2002359595 (hide)

Owner TIMBRE TECHNOLOGIES, INC.

Inventors NIU, Xinhui; JAKATDAR, Nickhil

Pub. Number AU-A-2002359595

PCT Number PCT/US02/38726

PCT Pub. Number WO2003/048706

Priority 10/007,124 04.12.01 US

Filing date 4 December 2002

Wipo publication date 17 June 2003

International Classifications

G01J 004/00 Measuring polarisation of light

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01B 011/30 Measuring arrangements characterised by the use of optical means - for measuring roughness or irregularity of surfaces

G01N 021/47 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Scattering, i.e. diffuse reflection

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/007,124 04.12.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002359595

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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