POLISHING PAD COMPRISING PARTICLES WITH A SOLID CORE AND POLYMERIC SHELL

Details for Australian Patent Application No. 2002359422 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors CHERIAN, Isaac, K.; ANJUR, Sriram, P.; GRUMBINE, Steven, K.

Pub. Number AU-A-2002359422

PCT Number PCT/US02/37024

PCT Pub. Number WO2003/045631

Priority 09/995,025 27.11.01 US

Filing date 19 November 2002

Wipo publication date 10 June 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 003/32 Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 09/995,025 27.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002359422

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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