MEMS DEVICE HAVING ELECTROTHERMAL ACTUATION AND RELEASE AND METHOD FOR FABRICATING

Details for Australian Patent Application No. 2002359368 (hide)

International Classifications

Event Publications

3 April 2003 Complete Application Filed

Priority application(s): 60/337,527 09.11.01 US; 60/337,528 09.11.01 US; 60/337,529 09.11.01 US; 60/338,055 09.11.01 US; 60/338,069 09.11.01 US; 60/338,072 09.11.01 US

24 July 2003 Application Open to Public Inspection

Published as AU-A-2002359368

29 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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