PARTICLES FOR USE IN CMP SLURRIES AND METHOD FOR PRODUCING THEM

Details for Australian Patent Application No. 2002359356 (hide)

Owner FERRO CORPORATION

Inventors FENG, Xiangdong; HER, Yie-Shein

Pub. Number AU-A-2002359356

PCT Number PCT/US02/35672

PCT Pub. Number WO2003/044123

Priority 09/992,485 16.11.01 US; 10/255,136 25.09.02 US

Filing date 6 November 2002

Wipo publication date 10 June 2003

International Classifications

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

C09G 001/02 Polishing compositions

C09C 001/68 Treatment of specific inorganic materials other than fibrous fillers - Loose abrasive particles

C09C 003/06 Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties - Treatment with inorganic compounds

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 09/992,485 16.11.01 US; 10/255,136 25.09.02 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002359356

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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