METHOD AND SYSTEM FOR REPAIRING DEFECTED PHOTOMASKS

Details for Australian Patent Application No. 2002358960 (hide)

Owner U.C.LASER LTD.

Inventors DMITRIEV, Vladimir, J.; OSHEMKOV, Sergey, V.; GULETSKIY, Nikolay, N.; BEN-ZVI, Guy; ZAIT, Eitan

Pub. Number AU-A-2002358960

PCT Number PCT/IL02/01001

PCT Pub. Number WO2003/071358

Priority 60/358,468 20.02.02 US

Filing date 12 December 2002

Wipo publication date 9 September 2003

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 60/358,468 20.02.02 US

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2002358960

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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