DEVICE FOR CONTROLLING AN APPARATUS GENERATING A CHARGED PARTICLE BEAM

Details for Australian Patent Application No. 2002358903 (hide)

Owner CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventors GIERAK, Jacques; HAWKES, Peter

Pub. Number AU-A-2002358903

PCT Number PCT/FR02/03937

PCT Pub. Number WO2003/044824

Priority 01/14990 20.11.01 FR

Filing date 18 November 2002

Wipo publication date 10 June 2003

International Classifications

H01J 037/304 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/305 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for casting, melting, evaporating, or etching

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 01/14990 20.11.01 FR

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002358903

5 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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