PLASMA PROCESS APPARATUS

Details for Australian Patent Application No. 2002358315 (hide)

Owner TOKOYO ELECTRON LIMITED

Inventors AKAHORI, Takashi; KAWAKAMI, Satoru; IWAMA, Nobuhiro; HIGASHIURA, Tsutomu

Pub. Number AU-A-2002358315

PCT Number PCT/JP02/13093

PCT Pub. Number WO2003/054911

Priority 2001-380168 13.12.01 JP

Filing date 13 December 2002

Wipo publication date 9 July 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 2001-380168 13.12.01 JP

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002358315

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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