Owner NUTOOL, INC.

Inventors BASOL, Bulent, M.

Pub. Number AU-A-2002358291

PCT Number PCT/US02/41415

PCT Pub. Number WO2003/060963

Priority 10/032,318 21.12.01 US; 60/424,936 08.11.02 US

Filing date 23 December 2002

Wipo publication date 30 July 2003

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C25F 003/02 Electrolytic etching or polishing

B08B 003/10 Cleaning by methods involving the use or presence of liquid or steam - with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration

C25D 005/08 Electroplating characterised by the process

C25D 005/48 Electroplating characterised by the process - After-treatment of electroplated surfaces

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

B05B 005/035 Electrostatic spraying apparatus

B05B 005/16 Electrostatic spraying apparatus

B05B 007/08 Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas

B05C 005/02 Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work - from an outlet device in contact, or almost in contact, with the work

C23F 001/00 Etching metallic material by chemical means

B23H 003/00 Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 018/38 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

H01L 021/3063 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C25F 003/12 Electrolytic etching or polishing

C25F 001/00 Electrolytic cleaning, degreasing, pickling, or descaling