METHOD OF MANUFACTURING AN OXIDE BEAM

Details for Australian Patent Application No. 2002358289 (hide)

Owner KIONIX INC. MILLER, Scott, A.

Inventors MILLER, Scott, A.

Pub. Number AU-A-2002358289

PCT Number PCT/US02/41318

PCT Pub. Number WO2004/059704

Priority 10/322,990 18.12.02 US

Filing date 26 December 2002

Wipo publication date 22 July 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/322,990 18.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2002358289

18 August 2005 Corrigenda

  Applications OPI - Name Index Under the name KIONIX INC.; MILLER, Scott, A., Application No. 2002358289, under INID (71) correct the name to read ADAMS, Scott, G.; KIONIX INC.; MILLER, Scott, A.

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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