SEMICONDUCTOR DEVICE COMPRISING A THIN OXIDE LINER AND METHOD OF MANUFACTURING THE SAME

Details for Australian Patent Application No. 2002358269 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BULLER, James, F.; LUNING, Scott; KADOSH, Daniel; CHEEK, Jon, D.

Pub. Number AU-A-2002358269

PCT Number PCT/US02/41103

PCT Pub. Number WO2003/054951

Priority 10/021,037 19.12.01 US

Filing date 19 December 2002

Wipo publication date 9 July 2003

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/021,037 19.12.01 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002358269

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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