METHOD FOR CALIBRATING AN INTERFEROMETER, METHOD FOR QUALIFYING AN OBJECT, AND METHOD FOR PRODUCING AN OBJECT

Details for Australian Patent Application No. 2002358025 (hide)

Owner CARL ZEISS SMT AG

Inventors BEIERSDORFER, Susanne; SCHULTE, Stefan; FREIMANN, Rolf; DORBAND, Bernd; SCHILLKE, Frank

Pub. Number AU-A-2002358025

PCT Number PCT/EP02/13091

PCT Pub. Number WO2004/046641

Filing date 21 November 2002

Wipo publication date 15 June 2004

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

G01M 011/00 Testing of optical apparatus

Event Publications

3 April 2003 Complete Application Filed

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2002358025

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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