METHODS FOR PLANARIZATION OF GROUP VIII METAL-CONTAINING SURFACES USING COMPLEXING AGENTS

Details for Australian Patent Application No. 2002357878 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors SINHA, Nishant; KLEIN, Rita, J.

Pub. Number AU-A-2002357878

PCT Number PCT/US02/40413

PCT Pub. Number WO2003/056620

Priority 10/028,040 21.12.01 US

Filing date 17 December 2002

Wipo publication date 15 July 2003

International Classifications

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09G 001/02 Polishing compositions

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 10/028,040 21.12.01 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002357878

9 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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