MULTI-TONE PHOTOMASK AND METHOD FOR MANUFACTURING THE SAME

Details for Australian Patent Application No. 2002357844 (hide)

Owner DUPONT PHOTOMASKS, INC.

Inventors JOHNSTONE, Eric, V.; KALK, Franklin, D.

Pub. Number AU-A-2002357844

PCT Number PCT/US02/40029

PCT Pub. Number WO2003/050622

Priority 60/341,478 13.12.01 US; 10/317,565 12.12.02 US

Filing date 13 December 2002

Wipo publication date 23 June 2003

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 60/341,478 13.12.01 US; 10/317,565 12.12.02 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002357844

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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