Particles for use in CMP slurries and method for producing them

Details for Australian Patent Application No. 2002357690 (hide)

Owner Ferro Corporation

Inventors Feng, Xiangdong; Her, Yie-Shein

Agent Spruson & Ferguson

Pub. Number AU-B-2002357690

PCT Number PCT/US02/35373

PCT Pub. Number WO2003/044122

Priority 09/992,485 16.11.01 US

Filing date 4 November 2002

Wipo publication date 10 June 2003

Acceptance publication date 19 April 2007

International Classifications

C09K 3/14 (2006.01) Materials not provided for elsewhere - Anti-slip materials

C01F 17/00 (2006.01) Compounds of the rare-earth metals, i.e. scandium, yttrium, lanthanum, or the group of the lanthanides

C01G 23/04 (2006.01) Compounds of titanium

C01G 23/053 (2006.01) Compounds of titanium

C03C 19/00 (2006.01) Surface treatment of glass, not in the form of fibres or filaments, by mechanical means

C09C 1/36 (2006.01) Treatment of specific inorganic materials other than fibrous fillers - Compounds of titanium

C09C 1/68 (2006.01) Treatment of specific inorganic materials other than fibrous fillers - Loose abrasive particles

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 09/992,485 16.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-B-2002357690

19 April 2007 Application Accepted

  Published as AU-B-2002357690

16 August 2007 Standard Patent Sealed

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