INTERLAYER ADHESION PROMOTER FOR LOW K MATERIALS

Details for Australian Patent Application No. 2002357645 (hide)

Owner HONEYWELL INTERNATIONAL, INC.

Inventors LEUNG, Roger, Y.; FAN, Wenya; NAMAN, Ananth; ZHOU, De-Ling; LU, Victor

Pub. Number AU-A-2002357645

PCT Number PCT/US02/29975

PCT Pub. Number WO2004/027850

Filing date 20 September 2002

Wipo publication date 8 April 2004

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2002357645

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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