CHEMICALLY AMPLIFIED POLYMER HAVING PENDANT GROUP WITH CYCLODODECYL AND RESIST COMPOSITION COMPRISING THE SAME

Details for Australian Patent Application No. 2002357535 (hide)

Owner DONGJIN SEMICHEM CO., LTD.

Inventors KIM, Jung-Woo; KIM, Deog-Bae; KIM, Jae-Hyun; KIM, Yun-Hyi

Pub. Number AU-A-2002357535

PCT Number PCT/KR02/02150

PCT Pub. Number WO2004/041770

Priority 2002-0067883 04.11.02 KR

Filing date 18 November 2002

Wipo publication date 7 June 2004

International Classifications

C07C 069/533 Esters of carboxylic acids

C07C 067/03 Preparation of carboxylic acid esters

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

C08F 220/00 Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide, or nitrile thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 2002-0067883 04.11.02 KR

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2002357535

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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