COATING MATERIAL FOR PATTERN FINENESS ENHANCEMENT AND METHOD OF FORMING FINE PATTERN WITH THE SAME

Details for Australian Patent Application No. 2002357516 (hide)

Owner TOKYO OHKA KOGYO CO., LTD.

Inventors SHINBORI, Hiroshi; SUGETA, Yoshiki

Pub. Number AU-A-2002357516

PCT Number PCT/JP02/13601

PCT Pub. Number WO2003/056393

Priority 2001-397569 27.12.01 JP

Filing date 26 December 2002

Wipo publication date 15 July 2003

International Classifications

G03F 007/40 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Treatment after imagewise removal, e.g. baking

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Complete Application Filed

  Priority application(s): 2001-397569 27.12.01 JP

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002357516

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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