METHOD AND STRUCTURE FOR CALIBRATING SCATTEROMETRYBASED METROLOGY TOOL USED TO MEASURE DIMENSIONS OF FEATURES ON A SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2002357274 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors NARIMAN, Homi, E.

Pub. Number AU-A-2002357274

PCT Number PCT/US02/40264

PCT Pub. Number WO2003/081662

Priority 10/103,223 19.03.02 US

Filing date 17 December 2002

Wipo publication date 8 October 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

G01R 031/265 Arrangements for testing electric properties

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 10/103,223 19.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2002357274

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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