METHOD OF ENHANCING CLEAR FIELD PHASE SHIFT MASKS BY ADDING PARALLEL LINE TO PHASE 0 REGION

Details for Australian Patent Application No. 2002357141 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LUKANC, Todd, P.; SPENCE, Christopher, A.

Pub. Number AU-A-2002357141

PCT Number PCT/US02/39483

PCT Pub. Number WO2003/050617

Priority 10/016,702 11.12.01 US

Filing date 9 December 2002

Wipo publication date 23 June 2003

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 10/016,702 11.12.01 US

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002357141

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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