HIGH FLOW RATE BUBBLER SYSTEM AND METHOD

Details for Australian Patent Application No. 2002357034 (hide)

Owner ASML US, INC.

Inventors TORKAMAN, Amir

Pub. Number AU-A-2002357034

PCT Number PCT/US02/38178

PCT Pub. Number WO2003/047735

Priority 60/337,566 30.11.01 US

Filing date 27 November 2002

Wipo publication date 17 June 2003

International Classifications

B01F 003/04 Mixing, e.g. dispersing, emulsifying, according to the phases to be mixed - gases or vapours with liquids

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 60/337,566 30.11.01 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002357034

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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