METHOD OF ELIMINATING VOIDS IN W PLUGS

Details for Australian Patent Application No. 2002356920 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors NGO, Minh, Van; PATON, Eric

Pub. Number AU-A-2002356920

PCT Number PCT/US02/35910

PCT Pub. Number WO2003/040436

Priority 09/986,263 08.11.01 US

Filing date 8 November 2002

Wipo publication date 19 May 2003

International Classifications

C25D 005/50 Electroplating characterised by the process

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/522 Details of semiconductor or other solid state devices

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 09/986,263 08.11.01 US

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002356920

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002356921-THREE-DIMENSIONAL PHASE CONTRAST MAGNETIC RESONANCE IMAGING USING INTERLEAVED PROJECTION-RECONSTRUCTION DATA

2002356919-Method of treating disorder related to high cholesterol concentration