METHODS OF AND APPARATUS FOR MAKING HIGH ASPECT RATIO MICROELECTROMECHANICAL STRUCTURES

Details for Australian Patent Application No. 2002356806 (hide)

Owner MEMGEN CORPORATION

Inventors ZHANG, Gang; LE, Qui, T.; COHEN, Adam, L.

Pub. Number AU-A-2002356806

PCT Number PCT/US02/32943

PCT Pub. Number WO2003/071007

Priority 60/329,654 15.10.01 US

Filing date 15 October 2002

Wipo publication date 9 September 2003

International Classifications

C25D 005/02 Electroplating characterised by the process - Electroplating of selected surface areas

B81B 001/00 Devices without movable or flexible elements, e.g. micro-capillary devices

C25D 005/10 Electroplating characterised by the process - Electroplating with more than one layer of the same or of different metals

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 60/329,654 15.10.01 US

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2002356806

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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