METHOD FOR DETERMINING AT LEAST ONE CHARACTERISTIC VARIABLE WHICH IS CHARACTERISTIC OF THE DISTRIBUTION OF THE ILLUMINATION ANGLE OF A LIGHT SOURCE USED TO ILLUMINATE AN OBJECT IN A PROJECTION LIGHTING SYSTEM

Details for Australian Patent Application No. 2002356748 (hide)

Owner CARL ZEISS SMT AG

Inventors DIECKMANN, Nils

Pub. Number AU-A-2002356748

PCT Number PCT/EP02/13430

PCT Pub. Number WO2003/046663

Priority 101 58 921.2 30.11.01 DE

Filing date 28 November 2002

Wipo publication date 10 June 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 101 58 921.2 30.11.01 DE

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002356748

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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