REMOVING AN AMORPHOUS OXIDE FROM A MONOCRYSTALLINE SURFACE

Details for Australian Patent Application No. 2002356551 (hide)

Owner MOTOROLA, INC.

Inventors DEMKOV, Alexander, A.; EDWARDS, John, L., Jr.; WEI, Yi; JORDAN, Dirk, C.; HU, Xiaoming; CRAIGO, James, Bradley; DROOPAD, Ravindranath; YU, Zhiyi

Pub. Number AU-A-2002356551

PCT Number PCT/US02/32344

PCT Pub. Number WO2003/038873

Priority 09/983,854 26.10.01 US

Filing date 10 October 2002

Wipo publication date 12 May 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 033/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 09/983,854 26.10.01 US

10 July 2003 Application Open to Public Inspection

  Published as AU-A-2002356551

15 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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