TUNABLE MULTI-ZONE GAS INJECTION SYSTEM

Details for Australian Patent Application No. 2002356543 (hide)

Owner LAM RESEARCH CORPORATION

Inventors RATTO, Douglas; SINGH, Harmeet; BENJAMIN, Neil; COOPERBERG, David, J.; VAHEDI, Vahid

Pub. Number AU-A-2002356543

PCT Number PCT/US02/32057

PCT Pub. Number WO2003/034463

Priority 60/328,796 15.10.01 US; 10/024,208 21.12.01 US

Filing date 9 October 2002

Wipo publication date 28 April 2003

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 60/328,796 15.10.01 US; 10/024,208 21.12.01 US

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002356543

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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