FORMATION OF COMPOSITE TUNGSTEN FILMS

Details for Australian Patent Application No. 2002356507 (hide)

Owner APPLIED MATERIALS, INC.

Inventors XI, Ming; LAI, Ken, K.; BYUN, Jeong, Soo; WU, Frederick, C.; SRINIVAS, Ramanujapuram, A.; GELATOS, Avgerinos; CHANG, Mei; KORI, Moris; SINHA, Ashok, K.; CHUNG, Hua; FANG, Hongbin; MAK, Alfred, W.; YANG, Michael, X.

Pub. Number AU-A-2002356507

PCT Number PCT/US02/22585

PCT Pub. Number WO2003/029515

Priority 60/306,027 16.07.01 US

Filing date 16 July 2002

Wipo publication date 14 April 2003

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 016/16 Chemical deposition or plating by decomposition - from metal carbonyl compounds

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 60/306,027 16.07.01 US

26 June 2003 Application Open to Public Inspection

  Published as AU-A-2002356507

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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