A METHOD OF ALIGNMENT BY USING INTERFEROMETRY

Details for Australian Patent Application No. 2002356488 (hide)

Owner MICRONIC LASER SYSTEMS AB

Inventors SANDSTROM, Torbjorn

Pub. Number AU-A-2002356488

PCT Number PCT/SE02/02245

PCT Pub. Number WO2003/048680

Priority 60/337,764 07.12.01 US; 10/310,637 04.12.02 US

Filing date 5 December 2002

Wipo publication date 17 June 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Complete Application Filed

  Priority application(s): 60/337,764 07.12.01 US; 10/310,637 04.12.02 US

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002356488

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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