PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES

Details for Australian Patent Application No. 2002355823 (hide)

Owner UNAXIS USA INC.

Inventors KENNEY, Mark, D.

Pub. Number AU-A-2002355823

PCT Number PCT/US02/22359

PCT Pub. Number WO2003/012359

Priority 10/163,567 06.06.02 US; 60/308,734 30.07.01 US

Filing date 15 July 2002

Wipo publication date 17 February 2003

International Classifications

F28F 007/00 Elements not covered by group , , or

A61M 005/00 Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way

B05C 013/00 Means for manipulating or holding work, e.g. for separate articles

B24B 005/00 Grinding surfaces of particular forms

B25J 015/06 Gripping heads - with vacuum or magnetic holding means

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 10/163,567 06.06.02 US; 60/308,734 30.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002355823

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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