WAFER CARRIER WEAR INDICATOR

Details for Australian Patent Application No. 2002355744 (hide)

Owner ENTEGRIS, INC.

Inventors ANDRES, Todd

Pub. Number AU-A-2002355744

PCT Number PCT/US02/24278

PCT Pub. Number WO2003/011517

Priority 60/309,314 01.08.01 US

Filing date 1 August 2002

Wipo publication date 17 February 2003

International Classifications

B24B 001/00

B24B 007/00 Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 60/309,314 01.08.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002355744

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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