AN INTERFEROMETER SYSTEM FOR A SEMICONDUCTOR EXPOSURE SYSTEM

Details for Australian Patent Application No. 2002355569 (hide)

Owner NIKON CORPORATION

Inventors INOUE, Fuyuhiko; NOVAK, W. Thomas; STUMBO, David

Pub. Number AU-A-2002355569

PCT Number PCT/US02/25238

PCT Pub. Number WO2003/014827

Priority 09/924,071 07.08.01 US

Filing date 7 August 2002

Wipo publication date 24 February 2003

International Classifications

G03B 027/42 Photographic printing apparatus - for automatic sequential copying of the same original

G03B 027/52 Photographic printing apparatus - Details

G03B 027/54 Photographic printing apparatus - Lamp housings

G03B 027/32 Photographic printing apparatus - Projection printing apparatus, e.g. enlarger, copying camera

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G03F 005/00 Screening processes

G01B 011/02 Measuring arrangements characterised by the use of optical means - for measuring length, width, or thickness

G01B 011/00 Measuring arrangements characterised by the use of optical means

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 09/924,071 07.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002355569

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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