MICROMACHINING METHOD USING IONBEAM

Details for Australian Patent Application No. 2002355510 (hide)

Owner THE NEW INDUSTRY RESEARCH ORGANIZATION

Inventors SANO, Naokatsu; KANEKO, Tadaaki; ASAOKA, Yasushi

Pub. Number AU-A-2002355510

PCT Number PCT/JP02/07999

PCT Pub. Number WO2003/015145

Priority 2001-238972 07.08.01 JP

Filing date 6 August 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-238972 07.08.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002355510

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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