GROUP III NITRIDE SEMICONDUCTOR FILM AND ITS PRODUCTION METHOD

Details for Australian Patent Application No. 2002355506 (hide)

Owner NAGOYA INDUSTRIAL SCIENCE RESEARCH INSTITUTE

Inventors HIRAMATSU, Kazumasa; MIYAKE, Hideto; YOSHIDA, Harumasa; URUSHIDO, Tatsuhiro; TERADA, Yusuke

Pub. Number AU-A-2002355506

PCT Number PCT/JP02/07748

PCT Pub. Number WO2003/015143

Priority 2001-233011 01.08.01 JP

Filing date 30 July 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-233011 01.08.01 JP

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002355506

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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