PROCESSING DEVICE, AND GAS DISCHARGE SUPPRESSING MEMBER

Details for Australian Patent Application No. 2002355042 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors NAGASEKI, Kazuya; KUBOTA, Tomoya; HAYASHI, Daisuke; HIMORI, Shinji; ENDOH, Shosuke

Pub. Number AU-A-2002355042

PCT Number PCT/JP02/12349

PCT Pub. Number WO2003/046969

Priority 2001-366370 30.11.01 JP

Filing date 27 November 2002

Wipo publication date 10 June 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-366370 30.11.01 JP

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002355042

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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