CASSETTE FOR STORING MULTIPLE SHEETS OF SEMICONDUCTOR WAFERS

Details for Australian Patent Application No. 2002355034 (hide)

Owner DISCO CORPORATION

Inventors NANJO, Masatoshi

Pub. Number AU-A-2002355034

PCT Number PCT/JP02/12313

PCT Pub. Number WO2004/049430

Filing date 26 November 2002

Wipo publication date 18 June 2004

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65D 085/86 Containers, packaging elements or packages, specially adapted for particular articles or materials - for electrical components

Event Publications

20 March 2003 Complete Application Filed

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2002355034

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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