PLASMA PROCESSING SYSTEM

Details for Australian Patent Application No. 2002355030 (hide)

Owner TOKYO ELECTRON LIMITED KABUSHIKI KAISHA TOSHIBA

Inventors ITO, Etsuji; SAKAI, Itsuko; HAYAMI, Toshihiro

Pub. Number AU-A-2002355030

PCT Number PCT/JP02/12303

PCT Pub. Number WO2003/046959

Priority 2001-361297 27.11.01 JP

Filing date 26 November 2002

Wipo publication date 10 June 2003

International Classifications

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-361297 27.11.01 JP

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002355030

12 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002355031-METHOD OF SYNTHESIZING MACROSPHELIDES

2002355029-PLATELIKE BODY TRANSPORTING DEVICE