METHOD FOR DETERMINING A POSITION OF A ROBOT

Details for Australian Patent Application No. 2002354602 (hide)

Owner APPLIED MATERIALS, INC.

Inventors HUDGENS, Jeff; COX, Damon, Keith; PENCIS, Chris, Holt; RICE, Michael; VAN GOGH, David, A.; FREEMAN, Marvin, L.

Pub. Number AU-A-2002354602

PCT Number PCT/US02/20647

PCT Pub. Number WO2003/007095

Priority 09/905,091 12.07.01 US

Filing date 1 July 2002

Wipo publication date 29 January 2003

International Classifications

G05B 019/404 Programme-control systems - characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia

B23Q 015/18 Measuring

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G05D 003/00 Control of position or direction

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 09/905,091 12.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002354602

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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