PROCESS FOR PRODUCING THIN OXIDE FILM AND PRODUCTION APPARATUS

Details for Australian Patent Application No. 2002354453 (hide)

Owner NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventors NISHIZAWA, Masayasu; YAMASAKI, Satoshi; YASUDA, Tetsuji

Pub. Number AU-A-2002354453

PCT Number PCT/JP02/12913

PCT Pub. Number WO2003/050038

Priority 2001/377102 11.12.01 JP

Filing date 10 December 2002

Wipo publication date 23 June 2003

International Classifications

C01B 013/14 Oxygen - Methods for preparing oxides or hydroxides in general

C01B 013/32 Oxygen - by oxidation or hydrolysis of elements or compounds in the liquid or solid state

C01B 033/12 Silicon

H01L 029/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001/377102 11.12.01 JP

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354453

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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