SUBSTRATE HOLDING DEVICE AND POLISHING DEVICE

Details for Australian Patent Application No. 2002354440 (hide)

Owner EBARA CORPORATION

Inventors TOGAWA, Tetsuji; NABEYA, Osamu; FUKUSHIMA, Makoto; SAKURAI, Kunihiko; YOSHIDA, Hiroshi; ICHIMURA, Teruhiko

Pub. Number AU-A-2002354440

PCT Number PCT/JP02/12816

PCT Pub. Number WO2003/049168

Priority 2001-372771 06.12.01 JP; 2001-379337 12.12.01 JP

Filing date 6 December 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-372771 06.12.01 JP; 2001-379337 12.12.01 JP

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354440

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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