REFLECTIVE ILLUMINATING OPTICAL ELEMENT, REFLECTIVE ILLUMINATING OPTICAL SYSTEM, AND DUV TO EUV EXPOSURE DEVICE

Details for Australian Patent Application No. 2002354418 (hide)

Owner NIKON CORPORATION

Inventors TAKAHASHI, Tomowaki; MITARAI, Kiyoshi

Pub. Number AU-A-2002354418

PCT Number PCT/JP02/12741

PCT Pub. Number WO2003/050857

Priority 2001/379238 12.12.01 JP; 2001/380628 13.12.01 JP; 2001/382018 14.12.01 JP

Filing date 5 December 2002

Wipo publication date 23 June 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001/379238 12.12.01 JP; 2001/380628 13.12.01 JP; 2001/382018 14.12.01 JP

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354418

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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