SUBSTRATE HOLDING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Details for Australian Patent Application No. 2002354196 (hide)

Owner NIKON CORPORATION

Inventors KONDO, Makoto

Pub. Number AU-A-2002354196

PCT Number PCT/JP02/13180

PCT Pub. Number WO2003/052804

Priority 2001-382897 17.12.01 JP

Filing date 17 December 2002

Wipo publication date 30 June 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-382897 17.12.01 JP

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354196

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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