FLUORIDE CRYSTAL MATERIAL FOR OPTICAL DEVICE USED FOR PHOTOLITHOGRAPHIC APPARATUS AND ITS MANUFACTURING METHOD

Details for Australian Patent Application No. 2002354150 (hide)

Owner NIKON CORPORATION

Inventors SAKUMA, Shigeru

Pub. Number AU-A-2002354150

PCT Number PCT/JP02/12928

PCT Pub. Number WO2003/054590

Priority 2001-375775 10.12.01 JP

Filing date 10 December 2002

Wipo publication date 9 July 2003

International Classifications

G02B 001/02 Optical elements characterised by the material of which they are made

C03B 029/12 Reheating glass products for softening or fusing their surfaces

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-375775 10.12.01 JP

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002354150

26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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