METHOD OF MANUFACTURING SEMICONDUCTOR CHIP

Details for Australian Patent Application No. 2002354108 (hide)

Owner DISCO CORPORATION

Inventors SEKIYA, Kazuma

Pub. Number AU-A-2002354108

PCT Number PCT/JP02/12830

PCT Pub. Number WO2003/058697

Priority 2001-400865 28.12.01 JP

Filing date 6 December 2002

Wipo publication date 24 July 2003

International Classifications

H01L 021/301 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-400865 28.12.01 JP

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2002354108

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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