NITRIDING METHOD FOR INSULATION FILM, SEMICONDUCTOR DEVICE AND PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE, SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD
Details for Australian Patent Application No. 2002354103 (hide)
International Classifications
Event Publications
20 March 2003 Complete Application Filed
Priority application(s): 2002-118477 19.04.02 JP; 2001-374631 07.12.01 JP; 2001-374632 07.12.01 JP; 2001-374633 07.12.01 JP; 2001-401210 28.12.01 JP
21 August 2003 Application Open to Public Inspection
Published as AU-A-2002354103
26 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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