DIFFRACTION OPTICAL DEVICE, REFRACTION OPTICAL DEVICE, ILLUMINATING OPTICAL DEVICE, EXPOSURE SYSTEM AND EXPOSURE METHOD

Details for Australian Patent Application No. 2002354091 (hide)

Owner NIKON CORPORATION

Inventors TANITSU, Osamu; TOYODA, Mitsunori

Pub. Number AU-A-2002354091

PCT Number PCT/JP02/12729

PCT Pub. Number WO2003/050856

Priority 2001-378001 12.12.01 JP; 2001-378063 12.12.01 JP

Filing date 4 December 2002

Wipo publication date 23 June 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 019/00 Condensers

G02B 027/18 Other optical systems - for optical projection, e.g. combination of mirror and condenser and objective

G02B 005/18 Optical elements other than lenses - Diffracting gratings

G02B 013/00 Optical objectives specially designed for the purposes specified below

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2001-378001 12.12.01 JP; 2001-378063 12.12.01 JP

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002354091

16 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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