AEROSOL CLEANING APPARATUS AND METHOD FOR CONTROL THEREOF

Details for Australian Patent Application No. 2002354060 (hide)

Owner SUMITOMO HEAVY INDUSTRIES, LTD.

Inventors MUNAKATA, Akihiko; TAKANASHI, Kyoko

Pub. Number AU-A-2002354060

PCT Number PCT/JP02/12246

PCT Pub. Number WO2003/107406

Priority 2002/176116 17.06.02 JP

Filing date 22 November 2002

Wipo publication date 31 December 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 2002/176116 17.06.02 JP

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2002354060

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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